Investigation of material removal mechanisms of laser-structured Si3N4 via single diamond grit scratching
Author: | Masih Paknejad, Bahman AzarhoushangORCiDGND, Ali ZahediORCiDGND, Mehdi Khakrangin, Mohammadali Kadivar |
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DOI: | https://doi.org/10.21203/rs.3.rs-1974605/v1 |
ISSN: | 2693-5015 |
Parent Title (English): | Research Square |
Document Type: | Working Paper |
Language: | English |
Year of Completion: | 2022 |
Release Date: | 2022/10/10 |
Tag: | Preprint Laser structuring; Material removal mechanism; Online-Ressource; Silicon nitride (Si3N4); Single grit diamond scratching; Ultrashort pulse laser |
Page Number: | 25 |
Open-Access-Status: | Open Access |
Licence (German): | ![]() |