Area Selectiv Atomic Layer Deposition on Noble Metals
Author: | Nicolai SimonORCiD, Aaron Urschel, Thomas Stieglitz, Volker BucherORCiDGND |
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DOI: | https://doi.org/10.1515/bmt-2022-2001 |
Parent Title (English): | BMT 2022, Abstracts of the 2022 Joint Annual Conference of the Austrian (ÖGBMT), German (VDE DGBMT) and Swiss (SSBE) Societies for Biomedical Engineering, 28.-30.09.2022, Innsbruck, Österreich |
Document Type: | Conference Proceeding |
Language: | English |
Year of Completion: | 2022 |
Release Date: | 2022/10/04 |
First Page: | 471 |
Open-Access-Status: | Open Access |
Licence (German): | ![]() |