Simulation of the laser-material interaction of ultrashort pulse laser processing of silicon nitride workpieces and the key factors in the ablation process
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| Author: | Babak Soltani, Faramarz Hojati, Amir DaneshiGND, Bahman AzarhoushangORCiDGND |
|---|---|
| URN: | https://urn:nbn:de:bsz:fn1-opus4-77825 |
| DOI: | https://doi.org/10.1007/s00170-021-07111-5 |
| ISSN: | 1433-3015 |
| Parent Title (English): | The International Journal of Advanced Manufacturing Technology |
| Document Type: | Article (peer-reviewed) |
| Language: | English |
| Year of Completion: | 2021 |
| Release Date: | 2021/12/09 |
| Tag: | Laser ablation; Laser power intensity; Multiphoton ionisation; Silicon nitride; Ultrashort pulse laser |
| Volume: | 114.2021 |
| Issue: | 11 |
| First Page: | 3719 |
| Last Page: | 3738 |
| Open-Access-Status: | Open Access |
| Licence (German): |  Creative Commons - CC BY - Namensnennung 4.0 International |