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Qualification of the Barrier Properties of ALD-coated Polymer Films with Humidity Sensors

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Author:Nicolai Simon, Ulrike Passlack, Thomas Stieglitz, Felix BlendingerORCiDGND, Volker BucherORCiDGND
ISBN:978-3-8007-5656-8
Parent Title (English):MikroSystemTechnik Kongress 2021, 08. - 10. November 2021, Stuttgart-Ludwigsburg, Germany
Publisher:VDE Verlag
Place of publication:Berlin
Document Type:Conference Proceeding
Language:English
Year of Completion:2021
Release Date:2021/11/05
First Page:380
Last Page:383
Licence (German):License LogoUrheberrechtlich gesch├╝tzt