Qualification of the Barrier Properties of ALD-coated Polymer Films with Humidity Sensors
Author: | Nicolai Simon, Ulrike Passlack, Thomas Stieglitz, Felix BlendingerORCiDGND, Volker BucherORCiDGND |
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ISBN: | 978-3-8007-5656-8 |
Parent Title (English): | MikroSystemTechnik Kongress 2021, 08. - 10. November 2021, Stuttgart-Ludwigsburg, Germany |
Publisher: | VDE Verlag |
Place of publication: | Berlin |
Document Type: | Conference Proceeding |
Language: | English |
Year of Completion: | 2021 |
Release Date: | 2021/11/05 |
First Page: | 380 |
Last Page: | 383 |
Licence (German): | ![]() |