Effect of Mechanical Loading and Increased Gap on the Dynamic Response of Multiple Degree of Freedom Electrostatic Actuator
| Author: | Hussam KloubORCiDGND |
|---|---|
| DOI: | https://doi.org/10.3390/IeCAT2020-08498 |
| Parent Title (English): | 1st International Electronic Conference on Actuator Technology : Materials, Devices and Applications session Novel design and device concepts, 23-27 November 2020, online |
| Document Type: | Conference Proceeding |
| Language: | English |
| Year of Completion: | 2020 |
| Release Date: | 2021/11/15 |
| Tag: | Electrostatic actuator; Electrostatic inchworm; Multiple degree of freedom actuator |
| Open-Access-Status: | Open Access |
| Licence (German): |  Urheberrechtlich geschützt |