Simulative and Experimental Characterization of an Adaptive Astigmatic Membrane Mirror
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| Author: | Ulrich Kallmann, Michael Lootze, Ulrich MeschederORCiDGND |
|---|---|
| URN: | https://urn:nbn:de:bsz:fn1-opus4-71799 |
| DOI: | https://doi.org/10.3390/mi12020156 |
| ISSN: | 2072-666X |
| Parent Title (English): | Micromachines |
| Document Type: | Article (peer-reviewed) |
| Language: | English |
| Year of Completion: | 2021 |
| Release Date: | 2021/04/07 |
| Tag: | Adaptive optics; Micro-optical electro-mechanical system (MOEMS); Optical simulation; Physical optics; Silicon-on-insulator (SOI) |
| Volume: | 12.2021 |
| Issue: | 2 |
| Article Number: | 156 |
| Page Number: | 17 |
| Open-Access-Status: | Open Access |
| Licence (German): |  Creative Commons - CC BY - Namensnennung 4.0 International |