Influence of electrochemical operating conditions on the microme-chanical properties of electrodeposited Nickel-Cobalt alloys for fabrication of microtools
| Document Type: | Conference Proceeding |
|---|---|
| Author: | Isman M. KhaziORCiDGND, Ulrich MeschederORCiDGND |
| URL: | https://ieeexplore.ieee.org/document/9012795 |
| ISBN: | 978-3-8007-5090-0 |
| Parent Title (English): | MikroSystemTechnik Kongress 2019 : Mikroelektronik | MEMS-MOEMS | Systemintegration – Säulen der Digitalisierung und künstlichen Intelligenz 28. – 30. Oktober 2019 in Berlin |
| Publisher: | VDE Verlag |
| Place of publication: | Berlin |
| Language: | English |
| Year of Completion: | 2019 |
| Release Date: | 2019/10/23 |
| First Page: | 599 |
| Last Page: | 602 |
| Open-Access-Status: | Closed Access |
| Licence (German): |  Urheberrechtlich geschützt |