Thin Photonic Crystals for Optical Characterization of Ultrathin Hafnium Dioxide in Mesoporous Layers
| Document Type: | Conference Proceeding |
|---|---|
| Author: | Andras KovacsORCiDGND, Ulrich MeschederORCiDGND |
| DOI: | https://doi.org/10.1109/ICSENS.2018.8589935 |
| ISBN: | 978-1-5386-4707-3 |
| Parent Title (English): | IEEE Sensors 2018, October 28 - 31, 2018, New Dehli, India, Conference Proceedings |
| Language: | English |
| Year of Completion: | 2018 |
| Release Date: | 2019/02/07 |
| Tag: | ALD; Hafnium dioxide; Optical spectroscopy; Photonic crystal; Porous silicon; Ultrathin |
| Page Number: | 4 |
| Open-Access-Status: | Closed Access |
| Licence (German): |  Urheberrechtlich geschützt |