Formation of arbitrarily shaped 3D-forms in silicon by electrochemical wet-etching
Author: | Alexey Ivanov, Ulrich MeschederORCiDGND, Peter Woias, Michael Kröner |
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Parent Title (German): | Forschungsbericht |
Document Type: | Report |
Identifier: | Im Katalog der Hochschule Furtwangen ansehen |
Language: | English |
Year of Completion: | 2009 |
Release Date: | 2018/09/25 |
First Page: | 34 |
Last Page: | 38 |
Forschungsbericht: | Forschungsbericht 2008/2009 |
Licence (German): | Urheberrechtlich geschützt |