Sequential Nano-Explosion Using Patterned Porous Silicon
| Author: | Shervin KeshavarziORCiDGND, Frederico Lima, Wolfgang Kronast, Ulrich MeschederORCiDGND |
|---|---|
| DOI: | https://doi.org/10.1109/JMEMS.2018.2797306 |
| ISSN: | 1057-7157 |
| Parent Title (English): | Journal of Microelectromechanical Systems |
| Document Type: | Article (peer-reviewed) |
| Language: | English |
| Year of Completion: | 2018 |
| Release Date: | 2018/07/17 |
| Tag: | Energetic material; MEMS; Porous silicon |
| Volume: | 27.2018 |
| Issue: | 2 |
| First Page: | 250 |
| Last Page: | 258 |
| Open-Access-Status: | Closed Access |
| Licence (German): |  Urheberrechtlich geschützt |