Effect of Capillary Forces in Room Temperature Si-Si Direct Bonding Technique Using Velcrolike Surfaces

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Author:Shervin KeshavarziORCiD, Ulrich MeschederORCiDGND, Holger Reinecke
DOI:https://doi.org/10.1109/JMEMS.2016.2646759
ISSN:1057-7157
Parent Title (English):Journal of Microelectromechanical Systems
Document Type:Article (peer-reviewed)
Language:English
Year of Completion:2017
Release Date:2018/05/03
Tag:Adhesion; Capillary forces; Porous silicon; Si-Si direct bonding
Volume:26.2017
Issue:2
First Page:385
Last Page:395
Access Rights:Innerhalb der Hochschule
Licence (German):License LogoEs gilt das UrhG