Effect of Capillary Forces in Room Temperature Si-Si Direct Bonding Technique Using Velcrolike Surfaces
| Author: | Shervin KeshavarziORCiDGND, Ulrich MeschederORCiDGND, Holger Reinecke |
|---|---|
| DOI: | https://doi.org/10.1109/JMEMS.2016.2646759 |
| ISSN: | 1057-7157 |
| Parent Title (English): | Journal of Microelectromechanical Systems |
| Document Type: | Article (peer-reviewed) |
| Language: | English |
| Year of Completion: | 2017 |
| Release Date: | 2018/05/03 |
| Tag: | Adhesion; Capillary forces; Porous silicon; Si-Si direct bonding |
| Volume: | 26.2017 |
| Issue: | 2 |
| First Page: | 385 |
| Last Page: | 395 |
| Open-Access-Status: | Closed Access |
| Licence (German): |  Urheberrechtlich geschützt |