Simulation supported design of micromechanical sensors

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Metadaten
Author:S. Majer, Ulrich MeschederGND
URL:https://www.witpress.com/elibrary/wit-transactions-on-the-built-environment/13/10926
ISSN:1743-3509
Parent Title (English):Transactions on the Built Environment
Document Type:Article (peer-reviewed)
Language:English
Year of Completion:1995
Release Date:2018/03/06
Volume:12.1995
Pagenumber:9
Access Rights:Frei verf├╝gbar
Licence (German):License LogoEs gilt das UrhG