Application Of Sic-X-Ray Masks For Fabricating Sub-Micron Devices
| Author: | U. Mackens, H. Lüthje, Ulrich MeschederORCiDGND, F. Mund, S. Pongratz |
|---|---|
| ISBN: | 9780892529582 |
| Parent Title (English): | Proceedings of SPIE: Volume 0923; Electron-Beam, X-Ray, and Ion Beam Technology: Submicrometer Lithographies VII |
| Document Type: | Conference Proceeding |
| Language: | English |
| Year of Completion: | 1988 |
| Release Date: | 2018/03/08 |
| Page Number: | 7 |
| Licence (German): |  Urheberrechtlich geschützt |