Application Of Sic-X-Ray Masks For Fabricating Sub-Micron Devices

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Metadaten
Author:U. Mackens, H. Lüthje, Ulrich MeschederORCiDGND, F. Mund, S. Pongratz
ISBN:9780892529582
Parent Title (English):Proceedings of SPIE: Volume 0923; Electron-Beam, X-Ray, and Ion Beam Technology: Submicrometer Lithographies VII
Document Type:Conference Proceeding
Language:English
Year of Completion:1988
Release Date:2018/03/08
Pagenumber:7
Access Rights:Frei verfügbar
Licence (German):License LogoEs gilt das UrhG