Maskenmetrologie: Anforderungen und Trends

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Metadaten
Author:M. Zander, Ulrich MeschederGND
ISBN:3-18-090935-8
Parent Title (German):Maskentechnik für Mikroelektronik-Bausteine : Tagungsbericht ; Tagung München, 14. November 1991
Publisher:VDI-Verlag
Place of publication:Düsseldorf
Document Type:Conference Proceeding
Language:German
Year of Completion:1991
Release Date:2018/03/05
First Page:7
Last Page:40
Access Rights:Frei verfügbar
Licence (German):License LogoEs gilt das UrhG