Konzept eines planaren 2-Achsen Silizium Neigungssensors

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Metadaten
Author:S. Majer, Ulrich MeschederGND
Parent Title (German):Mikro-System-Technik : Mikromechanik & Mikroelektronik ; Chemnitz '95 ; 16. - 17. Oktober 1995, Chemnitz
Document Type:Conference Proceeding
Language:German
Year of Completion:1995
Release Date:2018/03/05
First Page:112
Last Page:120
Access Rights:Frei verf├╝gbar
Licence (German):License LogoEs gilt das UrhG