Simulation supported design of micromechanical sensors
| Author: | S. Majer, Ulrich MeschederORCiDGND |
|---|---|
| ISBN: | 1-85312-390-0 |
| Parent Title (English): | Simulation and design of microsystems and microstructures : [papers presented at the First International Conference on the Simulation and Design of Microsystems and Microstructures, which was held in Southampton, UK, in September 1995 |
| Publisher: | Computational Mechanics Publ. |
| Place of publication: | Southampton |
| Document Type: | Conference Proceeding |
| Language: | English |
| Year of Completion: | 1995 |
| Release Date: | 2018/03/01 |
| First Page: | 329 |
| Last Page: | 337 |
| Licence (German): |  Urheberrechtlich geschützt |