Optical monitoring and control of Si wet etching
| Author: | Ulrich MeschederORCiDGND, Christiane Kötter |
|---|---|
| ISBN: | 0-7503-0536-3 |
| Parent Title (English): | Eurosensors XII : proceedings of the 12th European Conference on Solid-State Transducers and the 9th UK Conference on Sensors and their Applications, Southampton, UK, 13 - 16 September 1998 |
| Publisher: | Inst. of Physics Publ. |
| Place of publication: | Bristol |
| Document Type: | Conference Proceeding |
| Language: | English |
| Year of Completion: | 1998 |
| Release Date: | 2018/02/27 |
| First Page: | 51 |
| Last Page: | 54 |
| Licence (German): |  Urheberrechtlich geschützt |