Optical monitoring and control of Si wet etching
| Author: | Ulrich MeschederORCiDGND, Christiane Kötter |
|---|---|
| DOI: | https://doi.org/10.1016/S0924-4247(99)00212-5 |
| ISSN: | 0924-4247 |
| Parent Title (English): | Sensors and Actuators A: Physical |
| Document Type: | Article (peer-reviewed) |
| Language: | English |
| Year of Completion: | 1999 |
| Release Date: | 2018/02/27 |
| Tag: | Light-controlled etch rate; Optical monitoring of etch rate; Silicon micromachining |
| Volume: | 76.1999 |
| Issue: | 1-3 |
| First Page: | 425 |
| Last Page: | 430 |
| Open-Access-Status: | Closed Access |
| Licence (German): |  Urheberrechtlich geschützt |