Optical monitoring and control of Si wet etching

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Metadaten
Author:Ulrich MeschederGND, Christiane Kötter
DOI:https://doi.org/10.1016/S0924-4247(99)00212-5
ISSN:0924-4247
Parent Title (English):Sensors and Actuators A: Physical
Document Type:Article (peer-reviewed)
Language:English
Year of Completion:1999
Release Date:2018/02/27
Tag:Light-controlled etch rate; Optical monitoring of etch rate; Silicon micromachining
Volume:76.1999
Issue:1-3
First Page:425
Last Page:430
Access Rights:Innerhalb der Hochschule
Licence (German):License LogoEs gilt das UrhG