Porous silicon as multifunctional material in MEMS
| Document Type: | Conference Proceeding |
|---|---|
| Author: | Ulrich MeschederORCiDGND, Andras KovacsORCiDGND, Wolfgang Kronast, Istvan Barsony, Maria Adam, Cs. Dücsö |
| DOI: | https://doi.org/10.1109/NANO.2001.966471 |
| ISBN: | 0-7803-7215-8 |
| Parent Title (English): | Proceedings of the 2001 1st IEEE Conference on Nanotechnology : IEEE-NANO 2001 : October 28-30, 2001, Maui, Hawaii |
| Language: | English |
| Year of Completion: | 2001 |
| Release Date: | 2018/02/27 |
| Tag: | MEMS; Micromachining; Microsystems; Porous silicon |
| First Page: | 483 |
| Last Page: | 488 |
| Open-Access-Status: | Closed Access |
| Licence (German): |  Urheberrechtlich geschützt |