Surface Micromachining Process for C-Si as Active Material
| Author: | Andras KovacsORCiDGND, Ulrich MeschederORCiDGND |
|---|---|
| ISBN: | 978-3-540-42150-4 |
| Parent Title (English): | Transducers '01 Eurosensors XV : digest of technical papers / the 11th International Conference on Solid-State Sensors and Actuators, June 10-14, 2001, Munich, Germany |
| Publisher: | Springer |
| Place of publication: | Berlin |
| Document Type: | Conference Proceeding |
| Language: | English |
| Year of Completion: | 2001 |
| Release Date: | 2018/02/27 |
| Tag: | Porous silicon; Sacrificial layer; Surface micromachining |
| First Page: | 620 |
| Last Page: | 623 |
| Licence (German): |  Urheberrechtlich geschützt |