Porous silicon-based humidity sensor with interdigital electrodes and internal heaters
| Author: | P. Fürjes, Andras KovacsORCiDGND, Cs. Dücsö, Maria Adam, Bernhard Müller, Ulrich MeschederORCiDGND |
|---|---|
| DOI: | https://doi.org/10.1016/S0925-4005(03)00423-4 |
| ISSN: | 0925-4005 |
| Parent Title (English): | Sensors and Actuators B: Chemical |
| Document Type: | Article (peer-reviewed) |
| Language: | English |
| Year of Completion: | 2003 |
| Release Date: | 2018/02/27 |
| Tag: | Effective heating; Humidity sensor; Porous silicon |
| Volume: | 95.2003 |
| Issue: | 1-3 |
| First Page: | 140 |
| Last Page: | 144 |
| Open-Access-Status: | Closed Access |
| Licence (German): |  Urheberrechtlich geschützt |