Design Consideration and Realization of a Novel Micromechanical Bi-Stable Switch
| Author: | Markus Freudenreich, Ulrich MeschederORCiDGND, Gergoe Somogyi |
|---|---|
| ISBN: | 0-7803-7731-1 |
| Parent Title (English): | Transducers '03: The 12th International Conference on Solid-State Sensors, Actuators and Microsystems; Digest of Technical Papers, Volume 2 |
| Publisher: | IEEE |
| Document Type: | Conference Proceeding |
| Language: | English |
| Year of Completion: | 2003 |
| Release Date: | 2018/02/23 |
| First Page: | 1096 |
| Last Page: | 1099 |
| Licence (German): |  Urheberrechtlich geschützt |