Simulation and realization of a novel micromechanical bi-stable switch

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Author:Markus Freudenreich, Ulrich MeschederGND, Gergoe Somogyi
DOI:https://doi.org/10.1016/j.sna.2004.01.034
ISSN:0924-4247
Parent Title (English):Sensors and Actuators A: Physical
Document Type:Article (peer-reviewed)
Language:English
Year of Completion:2004
Release Date:2018/02/22
Tag:Bi-stability; FEM-simulation; Fibre switch; Micromechanical switch; SOI-technology
Volume:114.2004
Issue:2-3
First Page:451
Last Page:459
Access Rights:Frei verf├╝gbar
Licence (German):License LogoEs gilt das UrhG