MOEMS focusing device with ideal parabolic deflection shape

Export metadata

Additional Services

Share in Twitter Search Google Scholar
Metadaten
Author:Ulrich MeschederORCiDGND, Carlos Estan, Gergoe Somogyi, Markus Freudenreich
DOI:https://doi.org/10.1109/SENSOR.2005.1496624
ISBN:0-7803-8994-8
Parent Title (English):Transducers '05 : Seoul, Korea, The 13th International Conference on Solid-State Sensors, Actuators and Microsystems; Digest of Technical Papers
Document Type:Conference Proceeding
Language:English
Year of Completion:2005
Release Date:2018/02/22
Tag:Electrostatic focusing device; FEM simulation; MOEMS; SOI
Pagenumber:5
First Page:1000
Last Page:1005
Access Rights:Frei verf├╝gbar
Licence (German):License LogoEs gilt das UrhG