MOEMS focusing device with ideal parabolic deflection shape
| Author: | Ulrich MeschederORCiDGND, Carlos Estan, Gergoe Somogyi, Markus Freudenreich |
|---|---|
| DOI: | https://doi.org/10.1109/SENSOR.2005.1496624 |
| ISBN: | 0-7803-8994-8 |
| Parent Title (English): | Transducers '05 : Seoul, Korea, The 13th International Conference on Solid-State Sensors, Actuators and Microsystems; Digest of Technical Papers |
| Document Type: | Conference Proceeding |
| Language: | English |
| Year of Completion: | 2005 |
| Release Date: | 2018/02/22 |
| Tag: | Electrostatic focusing device; FEM simulation; MOEMS; SOI |
| Page Number: | 5 |
| First Page: | 1000 |
| Last Page: | 1005 |
| Licence (German): |  Urheberrechtlich geschützt |