Large Defection Analysis of Perforated Silicon Nitride Membranes
| Author: | Adam Kovacs, Zsolt Vizvary, Andras KovacsORCiDGND, Ulrich MeschederORCiDGND |
|---|---|
| Parent Title (English): | 6th European Solid Mechanics Conference: ESMC 2006; 28 August – 1 September, 2006 Budapest, Hungary |
| Document Type: | Conference Proceeding |
| Language: | English |
| Year of Completion: | 2006 |
| Release Date: | 2018/02/21 |
| Tag: | Finite elements; Membrane deflection; Perforated silicon nitride |
| Page Number: | 3 |
| Licence (German): |  Urheberrechtlich geschützt |