Active focusing device based on MOEMS technology

Export metadata

Additional Services

Share in Twitter Search Google Scholar
Metadaten
Author:Ulrich MeschederGND, Zoltan Torok, Wolfgang Kronast
ISBN:978-0-8194-6242-8
Parent Title (English):Proceedings of SPIE: Volume 8168; MEMS, MOEMS, and Micromachining II, 2006, Strasbourg, France
Document Type:Conference Proceeding
Language:English
Year of Completion:2006
Release Date:2018/02/21
Pagenumber:12
Access Rights:Frei verf├╝gbar
Licence (German):License LogoEs gilt das UrhG