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Active focusing device based on MOEMS technology

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Metadaten
Author:Ulrich MeschederORCiDGND, Zoltan Torok, Wolfgang Kronast
ISBN:978-0-8194-6242-8
Parent Title (English):Proceedings of SPIE: Volume 8168; MEMS, MOEMS, and Micromachining II, 2006, Strasbourg, France
Document Type:Conference Proceeding
Language:English
Year of Completion:2006
Release Date:2018/02/21
Page Number:12
Licence (German):License LogoUrheberrechtlich gesch├╝tzt