Active focusing device based on MOEMS technology
| Author: | Ulrich MeschederORCiDGND, Zoltan Torok, Wolfgang Kronast |
|---|---|
| ISBN: | 978-0-8194-6242-8 |
| Parent Title (English): | Proceedings of SPIE: Volume 8168; MEMS, MOEMS, and Micromachining II, 2006, Strasbourg, France |
| Document Type: | Conference Proceeding |
| Language: | English |
| Year of Completion: | 2006 |
| Release Date: | 2018/02/21 |
| Page Number: | 12 |
| Licence (German): |  Urheberrechtlich geschützt |