Distortion optimized focusing mirror device with large aperture
| Author: | Ulrich MeschederORCiDGND, Carlos Estan, Gergoe Somogyi, Markus Freudenreich |
|---|---|
| DOI: | https://doi.org/10.1016/j.sna.2005.09.034 |
| ISSN: | 0924-4247 |
| Parent Title (English): | Sensors and Actuators A: Physical |
| Document Type: | Article (peer-reviewed) |
| Language: | English |
| Year of Completion: | 2006 |
| Release Date: | 2018/02/20 |
| Tag: | Electrostatic focusing device; FEM simulation; MOEMS; SOI |
| Volume: | 130-131/2006 |
| Issue: | August |
| First Page: | 20 |
| Last Page: | 27 |
| Open-Access-Status: | Closed Access |
| Licence (German): |  Urheberrechtlich geschützt |