Distortion optimized focusing mirror device with large aperture

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Metadaten
Author:Ulrich MeschederORCiDGND, Carlos Estan, Gergoe Somogyi, Markus Freudenreich
DOI:https://doi.org/10.1016/j.sna.2005.09.034
ISSN:0924-4247
Parent Title (English):Sensors and Actuators A: Physical
Document Type:Article (peer-reviewed)
Language:English
Year of Completion:2006
Release Date:2018/02/20
Tag:Electrostatic focusing device; FEM simulation; MOEMS; SOI
Volume:130-131/2006
Issue:August
First Page:20
Last Page:27
Access Rights:Innerhalb der Hochschule
Licence (German):License LogoEs gilt das UrhG