Optimization of platinum adhesion in electrochemical etching process for multi-sensor systems
| Document Type: | Article (peer-reviewed) |
|---|---|
| Author: | Jutaphorn Kritwattanakhorn, Marie-Luise Bauersfeld, Andras KovacsORCiDGND, Bernhard Müller, Ulrich MeschederORCiDGND, Sven Rademacher, Jürgen Wöllenstein |
| DOI: | https://doi.org/10.1016/j.snb.2007.07.024 |
| ISSN: | 0925-4005 |
| Parent Title (English): | Sensors and Actuators B: Chemical |
| Language: | English |
| Year of Completion: | 2007 |
| Release Date: | 2018/02/20 |
| Tag: | Adhesion and diffusion barrier; Electrochemical etching process; Multifunctional sensor systems; Platinum; Porous silicon |
| Volume: | 127.2007 |
| Issue: | 1 |
| First Page: | 126 |
| Last Page: | 131 |
| Open-Access-Status: | Closed Access |
| Licence (German): |  Urheberrechtlich geschützt |