Estimation of elasticity modulus and fracture strength of thin perforated SiN membranes with finite element simulations
| Author: | Adam Kovacs, Andras KovacsORCiDGND, Ulrich MeschederORCiDGND |
|---|---|
| DOI: | https://doi.org/10.1016/j.commatsci.2007.07.023 |
| ISSN: | 0927-0256 |
| Parent Title (English): | Computational Materials Science |
| Document Type: | Article (peer-reviewed) |
| Language: | English |
| Year of Completion: | 2008 |
| Release Date: | 2018/02/19 |
| Tag: | Critical pressure; Microsieve; Silicon-nitride membrane |
| Volume: | 43.2008 |
| Issue: | 1 |
| First Page: | 59 |
| Last Page: | 64 |
| Open-Access-Status: | Closed Access |
| Licence (German): |  Urheberrechtlich geschützt |