Charging of SiO2 Electret Film by Ion Implantation for MEMS Based Energy Harvesting Systems

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Author:Ulrich MeschederORCiDGND, P. Urbanovic, Bernhard Müller, Safi Baborie
URL:http://cap.ee.imperial.ac.uk/~pdm97/powermems/2008/pdfs/501-504%20Mescheder,%20U.pdf
Parent Title (English):Proceedings of PowerMEMS 2008 + microEMS2008, Sendai, Japan, November 9-12, (2008)
Document Type:Conference Proceeding
Language:English
Year of Completion:2008
Release Date:2018/02/19
Tag:Charge decay; Ion implantation; SiO2 film electrets; Vibration energy harvesting
Pagenumber:4
First Page:501
Last Page:504
Access Rights:Frei verfügbar
Licence (German):License LogoCreative Commons - Namensnennung-Keine Bearbeitung