Charging of SiO2 Electret Film by Ion Implantation for MEMS Based Energy Harvesting Systems
| Author: | Ulrich MeschederORCiDGND, P. Urbanovic, Bernhard Müller, Safi Baborie |
|---|---|
| Parent Title (English): | Proceedings of PowerMEMS 2008 + microEMS2008, Sendai, Japan, November 9-12, (2008) |
| Document Type: | Conference Proceeding |
| Language: | English |
| Year of Completion: | 2008 |
| Release Date: | 2018/02/19 |
| Tag: | Charge decay; Ion implantation; SiO2 film electrets; Vibration energy harvesting |
| Page Number: | 4 |
| First Page: | 501 |
| Last Page: | 504 |
| Licence (German): |  Urheberrechtlich geschützt |