Optimisation of Surface Quality of 3D Silicon Master Forms for Injection Molding of Optical Micro Elements
| Document Type: | Conference Proceeding |
|---|---|
| Author: | Alexey Ivanov, Andras KovacsORCiDGND, Ulrich MeschederORCiDGND, S. Kuhn, M. Kübler, A. Burr |
| ISBN: | 978-3-8007-3183-1 |
| Parent Title (English): | MikroSystemTechnik - KONGRESS 2009: 12.10.2009 - 14.10.2009 in Berlin, Germany |
| Publisher: | VDE-Verlag |
| Place of publication: | Berlin |
| Language: | English |
| Year of Completion: | 2009 |
| Release Date: | 2018/02/19 |
| Tag: | CD-ROM |
| Page Number: | 4 |
| Licence (German): |  Urheberrechtlich geschützt |