Development of a tilt actuated micromirror for applications in laser interferometry
| Document Type: | Conference Proceeding |
|---|---|
| Author: | Wolfgang Kronast, Ulrich MeschederORCiDGND, Bernhard Müller, Antwi Nimo, Claus Braxmaier, Thilo Schuldt |
| DOI: | https://doi.org/10.1117/12.859648 |
| ISBN: | 978-0-8194-7990-7 |
| Parent Title (German): | Proceedings of SPIE: Volume 7594; SPIE MOEMS-MEMS, 2010, San Francisco, California, United States |
| Language: | German |
| Year of Completion: | 2010 |
| Release Date: | 2018/02/15 |
| Page Number: | 10 |
| Open-Access-Status: | Open Access |
| Licence (German): |  Urheberrechtlich geschützt |