Nasschemisches Ätzen von nahezu beliebigen 3D-Strukturen in Silizium
| Document Type: | Conference Proceeding |
|---|---|
| Author: | Alexey Ivanov, Andras KovacsORCiDGND, Ulrich MeschederORCiDGND |
| ISBN: | 978-3-8007-3216-6 |
| Parent Title (German): | 63. Mikro-Nano-Integration - 2. GMM-Workshops 03.03.2010 - 04.03.2010 in Erfurt, Germany |
| Publisher: | VDE-Verlag |
| Place of publication: | Berlin |
| Language: | German |
| Year of Completion: | 2010 |
| Release Date: | 2018/02/15 |
| Tag: | CD-ROM |
| Page Number: | 4 |
| Licence (German): |  Urheberrechtlich geschützt |