High quality 3D shapes by silicon anodization
| Author: | Alexey Ivanov, Andras KovacsORCiDGND, Ulrich MeschederORCiDGND |
|---|---|
| DOI: | https://doi.org/10.1002/pssa.201000163 |
| ISSN: | 1862-6319 |
| Parent Title (English): | physica status solidi (a) |
| Document Type: | Article (peer-reviewed) |
| Language: | English |
| Year of Completion: | 2011 |
| Release Date: | 2018/01/30 |
| Volume: | 208.2011 |
| Issue: | 6 |
| First Page: | 1383 |
| Last Page: | 1388 |
| Open-Access-Status: | Closed Access |
| Licence (German): |  Urheberrechtlich geschützt |