3D capacitive vibrational micro harvester using isotropic charging of electrets deposited on vertical sidewalls
| Author: | Antwi Nimo, Ulrich MeschederORCiDGND, Bernhard Müller, Awad S. Abou Elkeir |
|---|---|
| DOI: | https://doi.org/10.1117/12.886876 |
| ISBN: | 978-0-8194-8655-4 |
| Parent Title (English): | Proceedings of SPIE: Volume 8066; Smart Sensors, Actuators, and MEMS V, 18-20 April 2011, Prague, Czech Republic |
| Document Type: | Conference Proceeding |
| Language: | English |
| Year of Completion: | 2011 |
| Release Date: | 2018/01/29 |
| Page Number: | 14 |
| Open-Access-Status: | Open Access |
| Licence (German): |  Urheberrechtlich geschützt |