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Contact Mechanics and Needle Like Surfaces for Micro-Nano Integration

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Metadaten
Author:Shervin KeshavarziORCiDGND, Ulrich MeschederORCiDGND, Holger Reinecke, Andras KovacsORCiDGND
Parent Title (English):23rd Micromechanics and Microsystems Europe Workshop: MME 2012, September 9 - 12, Ilmenau, Germany
Document Type:Conference Proceeding
Language:English
Year of Completion:2012
Release Date:2018/01/29
Licence (German):License LogoUrheberrechtlich gesch├╝tzt