Contact Mechanics and Needle Like Surfaces for Micro-Nano Integration
| Author: | Shervin KeshavarziORCiDGND, Ulrich MeschederORCiDGND, Holger Reinecke, Andras KovacsORCiDGND |
|---|---|
| Parent Title (English): | 23rd Micromechanics and Microsystems Europe Workshop: MME 2012, September 9 - 12, Ilmenau, Germany |
| Document Type: | Conference Proceeding |
| Language: | English |
| Year of Completion: | 2012 |
| Release Date: | 2018/01/29 |
| Licence (German): |  Urheberrechtlich geschützt |