Dynamic Simulation of Electrochemical Etching of Silicon with COMSOL

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Author:Alexey Ivanov, Ulrich MeschederORCiDGND
URL:https://www.comsol.de/paper/dynamic-simulation-of-electrochemical-etching-of-silicon-with-comsol-13379
Parent Title (English):Proceedings COMSOL Conference, Milan, Italy, 10.-12.10.2012
Document Type:Conference Proceeding
Language:English
Year of Completion:2012
Release Date:2018/01/25
Pagenumber:7
Access Rights:Frei verf├╝gbar
Licence (German):License LogoEs gilt das UrhG