Development of a focusing micromirror device with an in-plane stress relief structure in silicon-on-insulator technology
| Author: | Wolfgang Kronast, Ulrich MeschederORCiDGND, Bernhard Müller, Rolf Huster |
|---|---|
| DOI: | https://doi.org/10.1117/1.JMM.13.1.011112 |
| ISSN: | 1932-5134 |
| Parent Title (English): | Journal of Micro/Nanolithography, MEMS, and MOEMS |
| Document Type: | Article (peer-reviewed) |
| Language: | English |
| Year of Completion: | 2014 |
| Release Date: | 2018/01/23 |
| Volume: | 13.2014 |
| Issue: | 1 |
| Open-Access-Status: | Open Access |
| Licence (German): |  Urheberrechtlich geschützt |