3D Strukturierung von Silizium mittels Grauwert-Technologie
Author: | Uma Muthiah, Isman M. KhaziORCiDGND, Ulrich MeschederORCiDGND |
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ISBN: | 978-3-8007-4491-6 |
Parent Title (German): | MikroSystemTechnik Kongress 2017: MEMS, Mikroelektronik, Systeme, 23. – 25. Oktober 2017 in München |
Publisher: | VDE Verlag |
Place of publication: | Berlin |
Document Type: | Conference Proceeding |
Language: | German |
Year of Completion: | 2017 |
Release Date: | 2018/01/10 |
Tag: | CD-ROM |
First Page: | 692 |
Last Page: | 695 |
Licence (German): | ![]() |