3D Strukturierung von Silizium mittels Grauwert-Technologie
| Document Type: | Conference Proceeding |
|---|---|
| Author: | Uma Muthiah, Isman M. KhaziORCiDGND, Ulrich MeschederORCiDGND |
| ISBN: | 978-3-8007-4491-6 |
| Parent Title (German): | MikroSystemTechnik Kongress 2017: MEMS, Mikroelektronik, Systeme, 23. – 25. Oktober 2017 in München |
| Publisher: | VDE Verlag |
| Place of publication: | Berlin |
| Language: | German |
| Year of Completion: | 2017 |
| Release Date: | 2018/01/10 |
| Tag: | CD-ROM |
| First Page: | 692 |
| Last Page: | 695 |
| Licence (German): |  Urheberrechtlich geschützt |