Modern Silicon-based MEMS Technology
| Author: | Ulrich MeschederORCiDGND |
|---|---|
| ISBN: | 1-4020-2928-4 |
| Parent Title (English): | Smart Sensors and MEMS |
| Subtitle (English): | Proceedings of the NATO Advanced Study Institute on Smart Sensors and MEMS, Povoa de Varzim, Portugal, 8-19 September 2003 |
| Publisher: | Kluwer Academic Publishers |
| Place of publication: | Dordrecht |
| Document Type: | Part of a Book |
| Language: | German |
| Year of Completion: | 2003 |
| Release Date: | 2017/12/15 |
| First Page: | 255 |
| Last Page: | 272 |
| Licence (German): |  Urheberrechtlich geschützt |