Modern Silicon-based MEMS Technology

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Author:Ulrich MeschederORCiDGND
Parent Title (English):Smart Sensors and MEMS
Subtitle (English):Proceedings of the NATO Advanced Study Institute on Smart Sensors and MEMS, Povoa de Varzim, Portugal, 8-19 September 2003
Publisher:Kluwer Academic Publishers
Place of publication:Dordrecht
Document Type:Part of a Book
Year of Completion:2003
Release Date:2017/12/15
First Page:255
Last Page:272
Access Rights:Frei verf├╝gbar
Licence (German):License LogoEs gilt das UrhG