Electrical properties of light-addressed sub-μm electrodes fabricated by use of nanostencil technology
| Author: | Volker BucherORCiDGND, Jürgen Brugger, Dieter Kern, Gyu M. Kim, Markus Schubert, Wilfried Nisch |
|---|---|
| DOI: | https://doi.org/10.1016/S0167-9317(02)00422-7 |
| ISSN: | 0167-9317 |
| Parent Title (English): | Microelectronic Engineering |
| Document Type: | Article (peer-reviewed) |
| Language: | English |
| Year of Completion: | 2002 |
| Release Date: | 2017/06/28 |
| Tag: | Light-addressing; Nanostencil; Shadow mask; Sub-mm electrode chip |
| Volume: | 61/62.2002 |
| Issue: | July |
| First Page: | 971 |
| Last Page: | 980 |
| Open-Access-Status: | Closed Access |
| Licence (German): |  Urheberrechtlich geschützt |