In-situ monitoring of electron beam induced deposition by atomic force microscopy in a scanning electron microscope
| Author: | S. Bauerdick, Claus J. Burkhardt, R. Rudorf, W. Barth, Volker BucherORCiDGND, Wilfried Nisch |
|---|---|
| DOI: | https://doi.org/10.1016/S0167-9317(03)00160-6 |
| ISSN: | 0167-9317 |
| Parent Title (English): | Microelectronic Engineering |
| Document Type: | Article (peer-reviewed) |
| Language: | English |
| Year of Completion: | 2003 |
| Release Date: | 2017/06/28 |
| Tag: | Atomic force microscope; Electron beam induced deposition; In-situ monitoring; Local gas injection; Micro manipulator |
| Volume: | 67/68.2003 |
| Issue: | June |
| First Page: | 963 |
| Last Page: | 969 |
| Open-Access-Status: | Closed Access |
| Licence (German): |  Urheberrechtlich geschützt |