Plasmabeschichtung in der Mikrotechnik
| Author: | Volker BucherORCiDGND, Diethard Kapp-Schwoerer |
|---|---|
| ISSN: | 1614-4538 |
| Parent Title (German): | Mikroproduktion |
| Document Type: | Contribution to a Periodical |
| Language: | German |
| Year of Completion: | 2008 |
| Release Date: | 2017/06/26 |
| Issue: | 5 |
| First Page: | 24 |
| Last Page: | 27 |
| Licence (German): |  Urheberrechtlich geschützt |