On the simulation of molded micro components and systems
Author: | Albert Albers, Hans-Georg EnklerORCiDGND, Pablo Leslabay |
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DOI: | https://doi.org/10.1007/s00542-007-0522-y |
ISSN: | 1432-1858 |
Parent Title (English): | Microsystem Technologies |
Subtitle (English): | High Aspect Ratio Micro Structure Technology Workshop, HARMST '07, Besançon, France, 7-9 June 2007 |
Document Type: | Article (peer-reviewed) |
Language: | English |
Year of Completion: | 2008 |
Release Date: | 2017/06/23 |
Volume: | 14.2008 |
Issue: | 9-11 |
First Page: | 1269 |
Last Page: | 1277 |
Open-Access-Status: | Closed Access |
Licence (German): | ![]() |