Micro gear validation: improving the correlation between virtual and physical testing

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Author:Albert Albers, Peter Börsting, Tobias Deigendesch, Hans-Georg EnklerORCiDGND, Pablo Leslabay
DOI:https://doi.org/10.1007/s00542-009-0997-9
ISSN:1432-1858
Parent Title (English):Microsystem Technologies
Subtitle (English):8th International Workshop on High Aspect Ratio Micro Structure Technology, HARMST 2009, June 25 to 28, Saskatoon, Saskatechwan, Canada
Document Type:Article (peer-reviewed)
Language:English
Year of Completion:2010
Release Date:2017/05/26
Volume:16.2010
Issue:8
First Page:1529
Last Page:1535
Access Rights:Frei verfügbar
Licence (German):License LogoEs gilt das UrhG