Micro gear validation: improving the correlation between virtual and physical testing
| Author: | Albert Albers, Peter Börsting, Tobias Deigendesch, Hans-Georg EnklerORCiDGND, Pablo Leslabay |
|---|---|
| DOI: | https://doi.org/10.1007/s00542-009-0997-9 |
| ISSN: | 1432-1858 |
| Parent Title (English): | Microsystem Technologies |
| Subtitle (English): | 8th International Workshop on High Aspect Ratio Micro Structure Technology, HARMST 2009, June 25 to 28, Saskatoon, Saskatechwan, Canada |
| Document Type: | Article (peer-reviewed) |
| Language: | English |
| Year of Completion: | 2010 |
| Release Date: | 2017/05/26 |
| Volume: | 16.2010 |
| Issue: | 8 |
| First Page: | 1529 |
| Last Page: | 1535 |
| Open-Access-Status: | Closed Access |
| Licence (German): |  Urheberrechtlich geschützt |