Application of local backside contacts for structuring Of silicon with anodization: simulation and experiments
| Author: | Alexey Ivanov, Andras KovacsORCiDGND, Ulrich MeschederORCiDGND |
|---|---|
| DOI: | https://doi.org/10.1016/j.proeng.2016.11.399 |
| ISSN: | 1877-7058 |
| Parent Title (English): | Procedia Engineering |
| Subtitle (English): | 30th Eurosensors Conference, EUROSENSORS 2016 |
| Document Type: | Contribution to a Periodical |
| Language: | English |
| Year of Completion: | 2016 |
| Release Date: | 2017/05/24 |
| Tag: | Electrochemical etching; Local backside contacts; Secondary current distribution; Silicon anodization; Simulation; Structuring |
| Volume: | 168.2016 |
| First Page: | 1180 |
| Last Page: | 1183 |
| Open-Access-Status: | Open Access |
| Licence (German): |  Creative Commons - Namensnennung, Nicht kommerziell, Keine Bearbeitung 3.0 |