Application of local backside contacts for structuring Of silicon with anodization: simulation and experiments

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Metadaten
Author:Alexey Ivanov, Andras Kovacs, Ulrich MeschederORCiDGND
DOI:https://doi.org/10.1016/j.proeng.2016.11.399
ISSN:1877-7058
Parent Title (English):Procedia Engineering
Subtitle (English):30th Eurosensors Conference, EUROSENSORS 2016
Document Type:Contribution to a Periodical
Language:English
Year of Completion:2016
Release Date:2017/05/24
Tag:Electrochemical etching; Local backside contacts; Secondary current distribution; Silicon anodization; Simulation; Structuring
Volume:168.2016
First Page:1180
Last Page:1183
Access Rights:Frei verf├╝gbar
Licence (German):License LogoCreative Commons - Namensnennung-Nicht kommerziell-Keine Bearbeitung