Room Temperature Si–Si Direct Bonding Technique Using Velcro-Like Surfaces
| Author: | Shervin KeshavarziORCiDGND, Ulrich MeschederORCiDGND, Holger Reinecke |
|---|---|
| DOI: | https://doi.org/10.1109/JMEMS.2016.2519823 |
| ISSN: | 1941-0158 |
| Parent Title (English): | Journal of Microelectromechanical Systems |
| Document Type: | Article (peer-reviewed) |
| Language: | English |
| Year of Completion: | 2016 |
| Release Date: | 2017/04/26 |
| Tag: | Direct bonding; Porous silicon; Velcro principle; van der Waals force |
| Volume: | 25.2016 |
| Issue: | 2 |
| First Page: | 371 |
| Last Page: | 379 |
| Open-Access-Status: | Open Access |
| Licence (German): |  Urheberrechtlich geschützt |