High voltage insulation properties of DLC-Parylene multilayer films for microsurgery instruments
| Author: | Michael Banghard, Romy Hartmann, Kamel Silmy, Wilfried Nisch, Rene P. von Metzen, Alfred Stett, Volker BucherORCiDGND |
|---|---|
| DOI: | https://doi.org/10.1016/j.mee.2016.03.057 |
| ISSN: | 0167-9317 |
| Parent Title (English): | Microelectronic Engineering |
| Document Type: | Article (peer-reviewed) |
| Language: | English |
| Year of Completion: | 2016 |
| Release Date: | 2017/04/24 |
| Tag: | Biocompatible and reprocessable; DLC PECVD; High voltage insulation layers; Layers; Medical devices; Minimal invasive surgery; Parylene |
| Volume: | 153.2016 |
| First Page: | 126 |
| Last Page: | 131 |
| Open-Access-Status: | Closed Access |
| Licence (German): |  Urheberrechtlich geschützt |