Surface Micromachining (Sacrificial Layer) and Its Applications in Electronic Devices

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Author:Alexey Ivanov, Ulrich MeschederORCiDGND
Parent Title (English):Porous Silicon: Optoelectronics, Microelectronics, and Energy Technology Applications, Volume Three
Publisher:CRC Press
Place of publication:Boca Raton
Editor:Ghenadii Korotcenkov
Document Type:Part of a Book
Opac ID:Im Katalog der Hochschule Furtwangen ansehen
Year of Completion:2016
Release Date:2017/01/24
Tag:Energy; Microelectronics; Optoelectronics
First Page:129
Last Page:141
Licence (German):License LogoEs gilt das UrhG