Surface Micromachining (Sacrificial Layer) and Its Applications in Electronic Devices
| Author: | Alexey Ivanov, Ulrich MeschederORCiDGND |
|---|---|
| ISBN: | 978-1-4822-6458-6 |
| Parent Title (English): | Porous Silicon: Optoelectronics, Microelectronics, and Energy Technology Applications, Volume Three |
| Publisher: | CRC Press |
| Place of publication: | Boca Raton |
| Editor: | Ghenadii Korotcenkov |
| Document Type: | Part of a Book |
| Identifier: | Im Katalog der Hochschule Furtwangen ansehen |
| Language: | English |
| Year of Completion: | 2016 |
| Release Date: | 2017/01/24 |
| Tag: | Energy; Microelectronics; Optoelectronics |
| First Page: | 129 |
| Last Page: | 141 |
| Licence (German): |  Urheberrechtlich geschützt |