Process Development For 3D Laser Lithography
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| Author: | Nigol Kaste, Alexander FilbertGND, Ulrich MeschederORCiDGND, Toomas Rang, Galina Rang |
|---|---|
| URN: | https://urn:nbn:de:bsz:fn1-opus4-10047 |
| DOI: | https://doi.org/10.2495/HPSM140131 |
| ISSN: | 1743-3509 |
| Parent Title (English): | WIT Transactions on The Built Environment |
| Document Type: | Article (peer-reviewed) |
| Language: | English |
| Year of Completion: | 2014 |
| Release Date: | 2016/11/15 |
| Tag: | 3D photolithography; Direct laser writing; Greyscale; MEMS; Medical application; Tactile sensor |
| Volume: | 137.2014 |
| First Page: | 139 |
| Last Page: | 150 |
| Open-Access-Status: | Open Access |
| Licence (German): |  Creative Commons - CC BY - Namensnennung 4.0 International |