Process Development For 3D Laser Lithography

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Author:Nigol Kaste, Alexander Filbert, Ulrich MeschederGND, Toomas Rang, Galina Rang
DOI:https://doi.org/10.2495/HPSM140131
ISSN:1743-3509
Parent Title (English):WIT Transactions on The Built Environment
Document Type:Article (peer-reviewed)
Language:English
Year of Completion:2014
Release Date:2016/11/15
Tag:3D photolithography; Direct laser writing; Greyscale; MEMS; Medical application; Tactile sensor
Volume:137.2014
First Page:139
Last Page:150
Access Rights:Frei verf├╝gbar
Licence (German):License LogoEs gilt das UrhG